VFSM type: CMD(predefined vfsm)

Object name: Flow1:MyCmd

Properties
Name	Value
Type	flow

Object name: Flow2:MyCmd

Properties
Name	Value
Type	flow

Object name: Flow3:MyCmd

Properties
Name	Value
Type	flow

Object name: Gas:MyCmd

Properties
Name	Value
Type	gas3

Object name: Press:MyCmd

Properties
Name	Value
Type	press

VFSM type: TI(predefined vfsm)

Object name: Flow1:Ti:Busy

Properties
Name	Value
Const	10
Clock	sec

Object name: Flow1:Ti:Opening

Properties
Name	Value
Const	3
Clock	sec

Object name: Flow2:Ti:Busy

Properties
Name	Value
Const	10
Clock	sec

Object name: Flow2:Ti:Opening

Properties
Name	Value
Const	3
Clock	sec

Object name: Flow3:Ti:Busy

Properties
Name	Value
Const	10
Clock	sec

Object name: Flow3:Ti:Opening

Properties
Name	Value
Const	3
Clock	sec

Object name: Press:Ti:Busy

Properties
Name	Value
Const	8
Clock	sec

VFSM type: AL(predefined vfsm)

Object name: Flow1:Al:OpeningError

Properties
Name	Value
Category	0
Text	Opening too long

Object name: Flow1:Al:RegulatingError

Properties
Name	Value
Category	0
Text	Flow not OK

Object name: Flow2:Al:OpeningError

Properties
Name	Value
Category	0
Text	Opening too long

Object name: Flow2:Al:RegulatingError

Properties
Name	Value
Category	0
Text	Flow not OK

Object name: Flow3:Al:OpeningError

Properties
Name	Value
Category	0
Text	Opening too long

Object name: Flow3:Al:RegulatingError

Properties
Name	Value
Category	0
Text	Flow not OK

Object name: Press:Al:PressureNotOk

Properties
Name	Value
Category	0
Text	Pressure not OK

VFSM type: DO(predefined vfsm)

Object name: Flow1:Do:FlowValve

Object name: Flow1:Do:Regulating

Object name: Flow2:Do:FlowValve

Object name: Flow2:Do:Regulating

Object name: Flow3:Do:FlowValve

Object name: Flow3:Do:Regulating

Object name: Press:Do:PressureOk

VFSM type: NO(predefined vfsm)

Object name: Flow1:No:FlowSetValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	1.5
Offset	0
OutData	Flow1:Par:FlowSetValue

Object name: Flow2:No:FlowSetValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	1.5
Offset	0
OutData	Flow1:Par:FlowSetValue

Object name: Flow3:No:FlowSetValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	1.5
Offset	0
OutData	Flow1:Par:FlowSetValue

VFSM type: NI(predefined vfsm)

Object name: Flow1:Ni:ActualFlowValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	0.2
Offset	0
Threshold	0

Object name: Flow2:Ni:ActualFlowValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	0.2
Offset	0
Threshold	0

Object name: Flow3:Ni:ActualFlowValue

Properties
Name	Value
Format	float
Unit	V
ScaleMode	Lin
ScaleFactor	0.2
Offset	0
Threshold	0

Object name: Press:Ni:ActualPressureValue

Properties
Name	Value
Format	short
Unit	mBar
ScaleMode	Exp
ScaleFactor	0.005
Offset	0
Threshold	0

VFSM type: SWIP(predefined vfsm)

Object name: Flow1:Swip:FlowRange

Properties
Name	Value
Input	Flow1:Ni:ActualFlowValue
LimitLow	200
LimitHigh	240

Object name: Flow2:Swip:FlowRange

Properties
Name	Value
Input	Flow2:Ni:ActualFlowValue
LimitLow	200
LimitHigh	240

Object name: Flow3:Swip:FlowRange

Properties
Name	Value
Input	Flow3:Ni:ActualFlowValue
LimitLow	200
LimitHigh	240

Object name: Press:Swip:Pressure

Properties
Name	Value
Input	Press:Ni:ActualPressureValue
LimitLow	5
LimitHigh	7

VFSM type: PAR(predefined vfsm)

Object name: Flow1:Par:FlowSetValue

Properties
Name	Value
Category	PP
Format	float
Unit	V
LimitLow	300
LimitHigh	700
InitValue	500

Object name: Flow2:Par:FlowSetValue

Properties
Name	Value
Category	PP
Format	float
Unit	V
LimitLow	300
LimitHigh	700
InitValue	500

Object name: Flow3:Par:FlowSetValue

Properties
Name	Value
Category	PP
Format	float
Unit	V
LimitLow	300
LimitHigh	700
InitValue	500

VFSM type: CNT(predefined vfsm)

Object name: Flow1:Cnt:FlowRangeExceeds

Properties
Name	Value
Const	4

Object name: Flow2:Cnt:FlowRangeExceeds

Properties
Name	Value
Const	4

Object name: Flow3:Cnt:FlowRangeExceeds

Properties
Name	Value
Const	4

VFSM type: Flow(user vfsm)

Flow ------- Flow controls a gas flow attenuator. The Flow state machine accepts commands (numbers) and sets an analog signal Ao and a digital signal Do. As a feedback from the attenuator the state machine receives the actual gas flow values as an analog signal Ai and a digital signal Di indicating the attenuator position (open/closed). Three commands determine attenuator operations: 1: open the gas flow by setting the High value of the digital output Do, 2: close the gas flow by setting the Low value of the digital output Do, 3: set the gas flow to the value determined by the numerical output Ao. Opening the flow valve is supervised by a timer TimO. If the valve does not open before the TimO timer expires an alarm AlaO is generated. The gas flow actual value is reached some time after setting the gas flow value and it is supervised by a timer TimR. If the gas flow value does not reach the set value before the TimR timer expires an alarm AlaR is generated. The actual gas flow is measured and its value delivered as an analog input signal Ai to the control system. Normally, it is required that the flow value stays within a certain limits. If the flow value exceeds the required range the state machine should after some delay issue an alarm and count this event. If it happens more than a certain number the state machine should issue immediately the alarm if the flow value exceeds the range. This last situation signalled to a Master by a state FlowNotOK.

Prefix: FLO

Object name: Flow1

Properties
Name	Value
MyCmd	Flow1:MyCmd
TimB	Flow1:Ti:Busy
TimO	Flow1:Ti:Opening
AlaO	Flow1:Al:OpeningError
AlaR	Flow1:Al:RegulatingError
DoRegulating	Flow1:Do:Regulating
DoValve	Flow1:Do:FlowValve
Ao	Flow1:No:FlowSetValue
Ai	Flow1:Ni:ActualFlowValue
SwipF	Flow1:Swip:FlowRange
Cnt	Flow1:Cnt:FlowRangeExceeds

Object name: Flow2

Properties
Name	Value
MyCmd	Flow2:MyCmd
TimB	Flow2:Ti:Busy
TimO	Flow2:Ti:Opening
AlaO	Flow2:Al:OpeningError
AlaR	Flow2:Al:RegulatingError
DoRegulating	Flow2:Do:Regulating
DoValve	Flow2:Do:FlowValve
Ao	Flow2:No:FlowSetValue
Ai	Flow2:Ni:ActualFlowValue
SwipF	Flow2:Swip:FlowRange
Cnt	Flow2:Cnt:FlowRangeExceeds

Object name: Flow3

Properties
Name	Value
MyCmd	Flow3:MyCmd
TimB	Flow3:Ti:Busy
TimO	Flow3:Ti:Opening
AlaO	Flow3:Al:OpeningError
AlaR	Flow3:Al:RegulatingError
DoRegulating	Flow3:Do:Regulating
DoValve	Flow3:Do:FlowValve
Ao	Flow3:No:FlowSetValue
Ai	Flow3:Ni:ActualFlowValue
SwipF	Flow3:Swip:FlowRange
Cnt	Flow3:Cnt:FlowRangeExceeds

IOid name: MyCmd (type: CMD-IN)

-->Virtual Input: CmdClose (2)

-->Virtual Input: CmdOpen (1)

-->Virtual Input: CmdRegulate (3)

IOid name: TimB (type: TI)

-->Virtual Input: TimB_OVER (OVER)

-->Virtual Output: TimB_ResetStart (ResetStart)

-->Virtual Output: TimB_Stop (Stop)

IOid name: TimO (type: TI)

-->Virtual Input: TimO_OVER (OVER)

-->Virtual Output: TimO_ResetStart (ResetStart)

-->Virtual Output: TimO_Stop (Stop)

IOid name: AlaO (type: AL)

-->Virtual Output: AlaO_Coming (Coming)

-->Virtual Output: AlaO_Going (Going)

IOid name: AlaR (type: AL)

-->Virtual Output: AlaF_Coming (Coming)

-->Virtual Output: AlaF_Going (Going)

IOid name: DoRegulating (type: DO)

-->Virtual Output: BadFlow (Low)

-->Virtual Output: RegulatingFlow (High)

IOid name: DoValve (type: DO)

-->Virtual Output: CloseFlow (Low)

-->Virtual Output: OpenFlow (High)

IOid name: Ao (type: NO)

-->Virtual Output: ResetFlowValue (Off)

-->Virtual Output: SetFlowValue (On)

IOid name: Ai (type: NI)

IOid name: SwipF (type: SWIP)

-->Virtual Input: FlowControl_OFF (OFF)

-->Virtual Input: Flow_HIGH (HIGH)

-->Virtual Input: Flow_IN (IN)

-->Virtual Input: Flow_LOW (LOW)

-->Virtual Input: NOT_Flow_IN (~IN)

-->Virtual Output: FlowSupervision_Off (Off)

-->Virtual Output: FlowSupervision_On (On)

IOid name: Cnt (type: CNT)

-->Virtual Input: Cnt_OVER (OVER)

-->Virtual Output: Cnt_Inc (Inc)

-->Virtual Output: Cnt_ResetStart (ResetStart)

State transition table, state ' Init ':

After startup Flow goes always to the state Closing: the inital state will be determined by inputs.

Init	EntryAction:
Init	ExitAction:
Closing	always

State transition table, state ' Busy ':

Entering this state Flow starts gas flow control by switching on the flow supervision and setting the gas flow value. A timer TimR is started and the counter Cnt is incremented. If the flow control functions properly the gas flow value is in range before the timer expires and Flow goes to the state Regulating. If it is not the case and the timer expires before the flow control is in range Flow goes to the state FlowNotOK. The same happens immediately by entering the state (remember the counter is incremented) if the counter Cnt is OVER signalling that Flow has entered the state Busy too many times (obviuosly, there are problems with the gas flow control). Flow reacts also in this state to commands Close and Open. Leaving the state Flow stops the timer.

Busy	EntryAction:	FlowSupervision_On SetFlowValue TimB_ResetStart Cnt_Inc
Busy	ExitAction:	TimB_Stop
Closing	CmdClose
FlowNotOK	TimB_OVER or Cnt_OVER
Opening	CmdOpen
Regulating	Flow_IN

State transition table, state ' FlowNotOK ':

This is an error state. Entering the state an alarm AlaR is issued. The alarm signals to the operator that the gas flow control does not work correctly. The state itself signals to the Master the same information. Depending on the entire design of the control system the Master may take automatically some action (sending for instance command Close). In addition, operator receives the information and is alerted. If the flow control repairs by itself (the flow value returns to the required range) Flow returns to the state Regulating. Flow reacts also in this state to commands Close and Open.

FlowNotOK	EntryAction:	AlaF_Coming
FlowNotOK	ExitAction:	AlaF_Going
	Flow_IN	AlaF_Going
Closing	CmdClose
Opening	CmdOpen
Regulating	Flow_IN

State transition table, state ' Regulating ':

This is a stable state. Staying in this state Flow signals that gas flow is correct. If the gas flow exceeds the required range Flow goes to the state Busy. Flow reacts also in this state to commands Close and Open. The RegulatingFlow and BadFlow are just to signal (fo instance a lamp) that the Flow state machine is in the state Regulating, i.e. the flow is regulated.

Regulating	EntryAction:	RegulatingFlow
Regulating	ExitAction:	BadFlow
Closing	CmdClose
Opening	CmdOpen
Busy	NOT_Flow_IN

State transition table, state ' Standby ':

Entering the state the supervision of the gas flow is switched off and the counter is reset. It is a stable state; Flow leaves this state only receiving commands: Open or Regulate.

Standby	EntryAction:	FlowSupervision_Off Cnt_ResetStart
Standby	ExitAction:
Opening	CmdOpen
Busy	CmdRegulate

State transition table, state ' Closing ':

Entering the state the Flow valve is closed and the gas flow value is set to 0 (off). In addition, the supervision of the actual gas flow is activated (FlowSupervision_On). Flow goes to Standby if the gas flow drops low enough (valve is closed). Cmd Regulate starts the gas flow control (Flow goes to the state Busy). receiving cmd Open Flow goes to the state Opening.

Closing	EntryAction:	CloseFlow ResetFlowValue FlowSupervision_On
Closing	ExitAction:
Standby	Flow_LOW or FlowControl_OFF
Opening	CmdOpen
Busy	CmdRegulate

State transition table, state ' Opening ':

Entering this state Flow starts opening of the flow valve: the supervison of the gas flow is switched on and the valve is open. To control the opening time a timer TimO is started. In addition, the counter is started (we need it later by gas flow control). The opening of the valve is signalled by high flow value. If the valve opens before the timer expires Flow goes to the state Open: this is a correct control sequence. If the timer expires before the valve is open an alarm AlaO is generated but we stay in the state as there is difficult to do something sensible. The operator should react to the alarm, check why the valve does not open and take some action. The alarm is cancelled if the valve opens in the meantime (supervision signals high value of the flow). Alternatively, Flow could return automatically to the state Standby. Command Close and Regulate force Flow to go correspondigly to states Closing and Busy.

Opening	EntryAction:	FlowSupervision_On ResetFlowValue OpenFlow TimO_ResetStart Cnt_ResetStart
Opening	ExitAction:	TimO_Stop
	TimO_OVER	AlaO_Coming
	Flow_HIGH	AlaO_Going
Open	Flow_HIGH
Closing	CmdClose
Busy	CmdRegulate

State transition table, state ' Open ':

This is a stable state; Flow reacts here only to commands Close and Regulate.

Open	EntryAction:
Open	ExitAction:
Closing	CmdClose
Busy	CmdRegulate

Total number of states: 8

VFSM type: Press(user vfsm)

Press -------- PRES state machine does not perform any true control - it does not have any output like Do or No. It rather supervisers the pressure and represents the result to the Master with its state. The actual pressure value delived by numerical input Ai is controlled by a switchpoint SwipPress and by a Timer. If the measurement is on the timer is started. If the timer expires before the pressure (Ai) reaches the required range Press signals the bad pressure with it state and issues an alarm. If the pressure returns to the required value Press signals it with its state. Thus, during measurement Press changes among states: Busy, PressOK and BadPress signalling to the Master the pressure value.

Prefix: PRE

Object name: Press

Properties
Name	Value
MyCmd	Press:MyCmd
Timer	Press:Ti:Busy
Alarm	Press:Al:PressureNotOk
Do	Press:Do:PressureOk
Ai	Press:Ni:ActualPressureValue
SwipPress	Press:Swip:Pressure

IOid name: MyCmd (type: CMD-IN)

-->Virtual Input: Cmd_Disable (2)

-->Virtual Input: Cmd_Enable (1)

IOid name: Timer (type: TI)

-->Virtual Input: Timer_OVER (OVER)

-->Virtual Output: Timer_ResetStart (ResetStart)

-->Virtual Output: Timer_Stop (Stop)

IOid name: Alarm (type: AL)

-->Virtual Output: Alarm_Coming (Coming)

-->Virtual Output: Alarm_Going (Going)

IOid name: Do (type: DO)

-->Virtual Output: Di_PressureNotOk (Low)

-->Virtual Output: Di_PressureOk (High)

IOid name: Ai (type: NI)

IOid name: SwipPress (type: SWIP)

-->Virtual Input: NOT_SwipPress_IN (~IN)

-->Virtual Input: SwipPress_IN (IN)

-->Virtual Output: SwipPress_Off (Off)

-->Virtual Output: SwipPress_On (On)

State transition table, state ' Init ':

Init	EntryAction:
Init	ExitAction:
Off	always

State transition table, state ' Off ':

By entering the state the switchpoint (supervison) is switched off which means that the pressure measurement is ceased. Receiving the command CmdEnable the vfsm changes to the state Busy.

Off	EntryAction:	SwipPress_Off
Off	ExitAction:
Busy	Cmd_Enable

State transition table, state ' Busy ':

By entering the state the switchpoint is switched on starting the pressure measurement. The vfsm expects that the pressure reaches the correct range within a certain period. Hence, the Timer is started. If the pressure is in the correct range the vfsm changes to the state PressOK. If the Timer expires the vfsm changes to the state BadPress. The pressure measurement can be discontinued by the command CmdDisable that forces the vfsm to change to the state Off.

Busy	EntryAction:	SwipPress_On Timer_ResetStart
Busy	ExitAction:	Timer_Stop
PressOK	SwipPress_IN
BadPress	Timer_OVER
Off	Cmd_Disable

State transition table, state ' PressOK ':

This state means that the pressure is correct. The pressure measurement can be discontinued by the command CmdDisable that forces the vfsm to change to the state Off. If the pressure is too low or too high the vfsm changes to the state Busy.

PressOK	EntryAction:	Di_PressureOk
PressOK	ExitAction:	Di_PressureNotOk
Busy	NOT_SwipPress_IN
Off	Cmd_Disable

State transition table, state ' BadPress ':

Entering the state the Alarm is issued to warn that the pressure is not ok. If the pressure improves the vfsm cancels the Alarm and changes to the state PressOK. The pressure measurement can be discontinued by the command CmdDisable that forces the vfsm to change to the state Off.

BadPress	EntryAction:	Alarm_Coming
BadPress	ExitAction:
	SwipPress_IN	Alarm_Going
PressOK	SwipPress_IN
Off	Cmd_Disable

Total number of states: 5

VFSM type: Gas3(user vfsm)

Gas ------ The state machine controls a gas inlet of a vacuum chamber. It does not do it directly but is a Master of two Slave state machines: Flow and Press which effectively control the hardware. Gas "sees" only the two state machines and coordinates their activity. The Press state machine represents through its state the pressure value. The Press state values interesting for Gas are: Off, BadPress and PressOK. The Flow state machine represents through its state the gas flow value. The Flow state values interesting for Gas are: Busy, Regulating and Standby. If Press is in the state PressOK and Flow in the state Regulating Gas should be in the state OK which signals the required situation in the control system. Gas controls the Slaves by sending them commands: Close/Regulate to Flow and Disable/Enable to Press.

Prefix: GAS

Object name: Gas3

Properties
Name	Value
MyCmd	Gas:MyCmd
Flow1	Flow1
Flow2	Flow2
Flow3	Flow3
Press	Press
Flow1Cmd	Flow1:MyCmd
Flow2Cmd	Flow2:MyCmd
Flow3Cmd	Flow3:MyCmd
PressCmd	Press:MyCmd

IOid name: MyCmd (type: CMD-IN)

-->Virtual Input: MyCmd_Off (1)

-->Virtual Input: MyCmd_On (2)

-->Virtual Output: MyCmd_Clear (0)

IOid name: Flow1 (type: VFSM)

flow

-->Virtual Input: Flow1_Regulating ( Regulating )

-->Virtual Input: Flow1_Standby ( Standby )

-->Virtual Input: NOT_Flow1_Regulating ( ~Regulating )

IOid name: Flow2 (type: VFSM)

flow

-->Virtual Input: Flow2_Regulating ( Regulating )

-->Virtual Input: Flow2_Standby ( Standby )

-->Virtual Input: NOT_Flow2_Regulating ( ~Regulating )

IOid name: Flow3 (type: VFSM)

flow

-->Virtual Input: Flow3_Regulating ( Regulating )

-->Virtual Input: Flow3_Standby ( Standby )

-->Virtual Input: NOT_Flow3_Regulating ( ~Regulating )

IOid name: Press (type: VFSM)

press

-->Virtual Input: Press_BadPress ( BadPress )

-->Virtual Input: Press_Off ( Off )

-->Virtual Input: Press_PressOK ( PressOK )

IOid name: Flow1Cmd (type: CMD-OUT)

flow

-->Virtual Output: Flow1Cmd_Close (2)

-->Virtual Output: Flow1Cmd_Regulate (3)

IOid name: Flow2Cmd (type: CMD-OUT)

flow

-->Virtual Output: Flow2Cmd_Close (2)

-->Virtual Output: Flow2Cmd_Regulate (3)

IOid name: Flow3Cmd (type: CMD-OUT)

flow

-->Virtual Output: Flow3Cmd_Close (2)

-->Virtual Output: Flow3Cmd_Regulate (3)

IOid name: PressCmd (type: CMD-OUT)

press

-->Virtual Output: PressCmd_Disable (2)

-->Virtual Output: PressCmd_Enable (1)

State transition table, state ' Init ':

Init	EntryAction:
Init	ExitAction:
OffBusy	always

State transition table, state ' OffBusy ':

Entering the state Gas sends commands Close to Flow and Disable to Press. Receiving from both slaves an acknowledgment (Flow in Standby and Press in Off) Gas goes to the state Off (note that this condition is realized as a complexed condition). Receiving command On Gas goes to the state OnBusy.

OffBusy	EntryAction:	Flow1Cmd_Close Flow2Cmd_Close Flow3Cmd_Close PressCmd_Disable
OffBusy	ExitAction:
Off	Flow1_Standby and Flow2_Standby and Flow3_Standby and Press_Off
OnBusy	MyCmd_On

State transition table, state ' OK ':

This is a stable state. If Gas reaches this state it means that the true goal of the control has been realized: the system has a proper gas flow value and the vacuum pressure is correct. Disturbances in the gas flow signalled by state Busy of the Flow state machine forces Gas to return to the state OnBusy. The bad pressure is a more serious problem and in such a case Gas leaves this state returning to the state OffBusy where it will try to repeat the control sequence. The transition to the state OffBusy can be also enforced by the command Off.

OK	EntryAction:
OK	ExitAction:
OffBusy	MyCmd_Off or Press_BadPress
OnBusy	NOT_Flow1_Regulating or NOT_Flow2_Regulating or NOT_Flow3_Regulating

State transition table, state ' Off ':

This is a stable state. Gas reacts here only to the command On going to the state OnBusy.

Off	EntryAction:
Off	ExitAction:
OnBusy	MyCmd_On

State transition table, state ' OnBusy ':

Entering the state Gas starts Flow regulating and disables Press. It waits here for an acknowledgement from Flow that it is regulating. It reacts also to a command Off going to the state OffBusy.

OnBusy	EntryAction:	Flow1Cmd_Regulate Flow2Cmd_Regulate Flow3Cmd_Regulate PressCmd_Disable MyCmd_Clear
OnBusy	ExitAction:
OffBusy	MyCmd_Off
On	Flow1_Regulating and Flow2_Regulating and Flow3_Regulating

State transition table, state ' On ':

As Gas can enter this state only from the state OnBusy it means that the Flow is now regulating. Therefore, entering this state Gas enables Press and waits whether the Press is OK. If the Press is OK Gas go to the state OK. If in the meantime the Flow is not regulating (signalling it with the state Busy) Gas returns to the state On Busy. A bad pressure value or the command Off force Gas to go to the state OffBusy.

On	EntryAction:	PressCmd_Enable
On	ExitAction:
OnBusy	NOT_Flow1_Regulating or NOT_Flow2_Regulating or NOT_Flow3_Regulating
OK	Press_PressOK
OffBusy	MyCmd_Off or Press_BadPress

Total number of states: 6

VFSM type: Ni4(unit)

Prefix: NI4

Object name: NI4_Unit5

Properties
Name	Value
CommPort	0
PhysAddr	5
Ni0	Press:Ni:ActualPressureValue
Ni1	Flow1:Ni:ActualFlowValue
Ni2	Flow2:Ni:ActualFlowValue
Ni3	Flow3:Ni:ActualFlowValue

IOid name: Ni0 (type: NI)

IOid name: Ni1 (type: NI)

IOid name: Ni2 (type: NI)

IOid name: Ni3 (type: NI)

VFSM type: No4(unit)

Prefix: NO4

Object name: NO4_Unit7

Properties
Name	Value
CommPort	0
PhysAddr	7
No0	Flow1:No:FlowSetValue
No1	Flow2:No:FlowSetValue
No2	Flow3:No:FlowSetValue
No3

IOid name: No0 (type: NO)

IOid name: No1 (type: NO)

IOid name: No2 (type: NO)

IOid name: No3 (type: NO)

VFSM type: DO8(unit)

Prefix: DOU

Object name: DO8_Unit3

Properties
Name	Value
CommPort	0
PhysAddr	3
Do0	Press:Do:PressureOk
Do1	Flow1:Do:Regulating
Do2	Flow2:Do:Regulating
Do3	Flow3:Do:Regulating
Do4	Flow1:Do:FlowValve
Do5	Flow2:Do:FlowValve
Do6	Flow3:Do:FlowValve
Do7

IOid name: Do0 (type: DO)

IOid name: Do1 (type: DO)

IOid name: Do2 (type: DO)

IOid name: Do3 (type: DO)

IOid name: Do4 (type: DO)

IOid name: Do5 (type: DO)

IOid name: Do6 (type: DO)

IOid name: Do7 (type: DO)